Kính hiển vi điện tử quét độ phân giải cao - JSM-IT710HR
Simple SEM function enables automatic measurements by registering multiple conditions at once. Simple
This improves the efficiency of routine work.
Imaging is possible at a low magnification with a little distortion, due to the out-lens objective lens.
The LHSED, a new low-vacuum detector, enables observation while switching between images containing light emission information and topographic images.
LHSED Features
JSM-IT710HR does not require complicated manual adjustment and provides automatic adjustment from axis alignment to astigmatism correction and focusing.
Secondary electron detector (SED)
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Low vacuum secondary electron detector (LVSED/LHSED)
The Schottky field emission gun used in the JSM-IT710HR enables high-resolution observation and analysis because the electron gun is integrated with the condenser lens to create large currents while maintaining a small probe.
The new multi-segmented backscattered electron detector acquires backscattered electron images from four directions at once so that a simple 3D image can be created and displayed live, in real-time.
Zeromag's optical image simplifies navigation.
SEM images can be linked to optical images for easy observation, analysis, and automated measurements.
JEOL manufactures and sells not only SEMs but also EDS.
Fully embedded EDS with SEM for simplified workflow, operation and data management.
JEOL’s EDS system supports a new phase analysis function. Phase maps can be created from map data set.
Backscattered electron image
Phase mapping (Overlay of multiple phases)
Specimen: cross section of a cutting tool for precision machining
Phase analysis indicates component difference between Co, Cu and Sn rich area
Applicable features of JSM-IT710HR: high r esolution, high contrast, wide-ar ea observation
Clear observation of a nanovoid at the junction interface of an electronic device
Specimen: LED cross section prepared using CP*
Magnification: ×250 (top), ×1,000 (bottom left), ×40,000 (bottom right)
Accelerating voltage: 5 kV
Using the low-vacuum function to observe a wide area of the wiring pattern surface
High-resolution EDS map
Specimen: SRAM cross section prepared using CP
Magnification: ×10,000 (top), ×50,000 (bottom)
Accelerating voltage: 5 kV (SEM), 7 kV (EDS)